Paired interference 3-dB coupler based on SOI rib waveguides with anisotropic chemical wet etching

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	Paired interference 3-dB coupler based on SOI rib waveguides with anisotropic chemical wet etching
	Li ZY
刊名	chinese optics letters
	2007
卷号	5 期号:4 页码:215-217
关键词	SILICON-ON-INSULATOR
ISSN号	1671-7694
通讯作者	li, zy, chinese acad sci, inst semicond, state key lab integrated optoelect, beijing 100083, peoples r china. 电子邮箱地址: lizhy@semi.ac.cn
中文摘要	a 3-db paired interference (pi) optical coupler in silicon-on-insulator (soi) based on rib waveguides with trapezoidal cross section was designed with simulation by a modified finite-difference beam propagation method (fd-bpm) and fabricated by potassium hydroxide (koh) anisotropic chemical wet etching. theoretically, tolerances of width, length, and port distance are more than 1, 100, and 1 mu m, respectively. smooth interface was obtained with the propagation loss of 1.1 db/cm at the wavelength of 1.55 mu m. the coupler has a good uniformity of 0.2 db and low excess loss of less than 2 db.
学科主题	光电子学
收录类别	SCI
语种	英语
公开日期	2010-03-08
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/6726]
专题	半导体研究所_中国科学院半导体研究所（2009年前）
推荐引用方式 GB/T 7714	Li ZY. Paired interference 3-dB coupler based on SOI rib waveguides with anisotropic chemical wet etching[J]. chinese optics letters,2007,5(4):215-217.
APA	Li ZY.(2007).Paired interference 3-dB coupler based on SOI rib waveguides with anisotropic chemical wet etching.chinese optics letters,5(4),215-217.
MLA	Li ZY."Paired interference 3-dB coupler based on SOI rib waveguides with anisotropic chemical wet etching".chinese optics letters 5.4(2007):215-217.