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	A thin film thermoelectric device fabricated by a self-aligned shadow mask method
	Yang, Fanglong; Zheng, Shuqi; Wang, Hanfu; Chu, Weiguo; Dong, Yuhua
刊名	JOURNAL OF MICROMECHANICS AND MICROENGINEERING
	2017
卷号	27
关键词	shadow mask thin film thermoelectric device thermopile sensor thermal evaporation
ISSN号	0960-1317
DOI	10.1088/1361-6439/aa64a3
URL标识	查看原文
收录类别	SCIE ; EI
WOS记录号	WOS:000415650900003
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/6271134
专题	中国石油大学（北京）
推荐引用方式 GB/T 7714	Yang, Fanglong,Zheng, Shuqi,Wang, Hanfu,et al. A thin film thermoelectric device fabricated by a self-aligned shadow mask method[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2017,27.
APA	Yang, Fanglong,Zheng, Shuqi,Wang, Hanfu,Chu, Weiguo,&Dong, Yuhua.(2017).A thin film thermoelectric device fabricated by a self-aligned shadow mask method.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,27.
MLA	Yang, Fanglong,et al."A thin film thermoelectric device fabricated by a self-aligned shadow mask method".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 27(2017).

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