Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator

	Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator
	Wu, GQ ; Xu, DH ; Xiong, B ; Wang, YL
刊名	APPLIED PHYSICS LETTERS
	2012
卷号	101 期号:19 页码:193505
关键词	micromechanical resonators microsensors piezoresistive devices
ISSN号	0003-6951
通讯作者	Wu, GQ (reprint author), Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Sci & Technol Microsyst Lab, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China.
中文摘要	A balanced wheatstone bridge technique for piezoresistive detection in micromechanical resonators is demonstrated. Two identical beam resonators, which vibrate in the length extensional mode with 180 degrees phase shift, are connected in serial to compose
学科主题	Physics
收录类别	2012SCI-015
原文出处	10.1063/1.4766441
语种	英语
公开日期	2013-04-23
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/114891]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Wu, GQ,Xu, DH,Xiong, B,et al. Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator[J]. APPLIED PHYSICS LETTERS,2012,101(19):193505.
APA	Wu, GQ,Xu, DH,Xiong, B,&Wang, YL.(2012).Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator.APPLIED PHYSICS LETTERS,101(19),193505.
MLA	Wu, GQ,et al."Wheatstone bridge piezoresistive sensing for bulk-mode micromechanical resonator".APPLIED PHYSICS LETTERS 101.19(2012):193505.