The Influence of Sputtering Power on Phase-Change Films

	The Influence of Sputtering Power on Phase-Change Films
	Zhang, L ; Gu, LX ; Han, XD ; Huang, H ; Dai, YA ; Cheng, Y ; Wang, Y ; Zhang, Z ; Wu, YQ ; Liu, B ; Song, ZT
刊名	ELECTROCHEMICAL AND SOLID STATE LETTERS
	2012
卷号	15 期号:6 页码:H205-H207
ISSN号	1099-0062
通讯作者	Zhang, L (reprint author), Beijing Univ Technol, Inst Microstruct & Property Adv Mat, Beijing 100124, Peoples R China.
中文摘要	Sputter-deposited amorphous films of a phase-change material (Ge2Sb2Te5) were prepared with various magnetron sputtering powers to determine its influence. Microscopic characteristics indicate that the sputtering power affects the film morphology: high sp
学科主题	Electrochemistry; Materials Science
收录类别	2012SCI-228
原文出处	10.1149/2.024206esl
语种	英语
公开日期	2013-04-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/114847]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Zhang, L,Gu, LX,Han, XD,et al. The Influence of Sputtering Power on Phase-Change Films[J]. ELECTROCHEMICAL AND SOLID STATE LETTERS,2012,15(6):H205-H207.
APA	Zhang, L.,Gu, LX.,Han, XD.,Huang, H.,Dai, YA.,...&Song, ZT.(2012).The Influence of Sputtering Power on Phase-Change Films.ELECTROCHEMICAL AND SOLID STATE LETTERS,15(6),H205-H207.
MLA	Zhang, L,et al."The Influence of Sputtering Power on Phase-Change Films".ELECTROCHEMICAL AND SOLID STATE LETTERS 15.6(2012):H205-H207.