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	Preparation and characterization of DLC films by twinned ECR microwave plasma enhanced CVD for microelectromechanical systems (MEMS) applications
	Li, X; Tang, ZA; Deng, XL; Shen, YX; Ding, HT
刊名	JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION
	2004
卷号	19页码:44-47
关键词	DLC films ECR-MPECVD MEMS
ISSN号	1000-2413
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/6191523
专题	大连理工大学
作者单位	1.Dalian Univ Technol, Dept Elect Engn, Dalian 116024, Peoples R China. 2.Shenyang Univ Technol, Shenyang, Peoples R China.
推荐引用方式 GB/T 7714	Li, X,Tang, ZA,Deng, XL,et al. Preparation and characterization of DLC films by twinned ECR microwave plasma enhanced CVD for microelectromechanical systems (MEMS) applications[J]. JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION,2004,19:44-47.
APA	Li, X,Tang, ZA,Deng, XL,Shen, YX,&Ding, HT.(2004).Preparation and characterization of DLC films by twinned ECR microwave plasma enhanced CVD for microelectromechanical systems (MEMS) applications.JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION,19,44-47.
MLA	Li, X,et al."Preparation and characterization of DLC films by twinned ECR microwave plasma enhanced CVD for microelectromechanical systems (MEMS) applications".JOURNAL OF WUHAN UNIVERSITY OF TECHNOLOGY-MATERIALS SCIENCE EDITION 19(2004):44-47.

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