| Analysis and design of resistance-wire heater in MOCVD reactor | |
| Qu, YX; Wang, B; Hu, SG; Wu, XF; Li, ZM; Tang, ZJ; Li, J; Hu, YL | |
| 刊名 | Journal of Central South University
 |
| 2014 | |
| 卷号 | Vol.21 No.9页码:3518-3524 |
| 关键词 | metal organic chemical vapor deposition (MOCVD) reactor design thermal analysis filament heating |
| ISSN号 | 2095-2899;2227-5223 |
| URL标识 | 查看原文 |
| 公开日期 | [db:dc_date_available] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/6105510 |
| 专题 | 湖南大学 |
| 作者单位 | 1.Advanced Technology Generalization Institute of CNGC,Beijing,China 2.The Center of Coordination and Support of State Administration of Science,Technology and Industry for National Defence,Beijing,China 3.School of Information and Electrical Engineering,Hunan University of Science and Technology,Xiangtan,China 4.School of Information Science and Engineering,University of Jinan,Ji’nan,China 5.The 41st Institute of China Electronics Technology Group Corporation,Qingdao,China |
| 推荐引用方式 GB/T 7714 | Qu, YX,Wang, B,Hu, SG,et al. Analysis and design of resistance-wire heater in MOCVD reactor[J]. Journal of Central South University,2014,Vol.21 No.9:3518-3524. |
| APA | Qu, YX.,Wang, B.,Hu, SG.,Wu, XF.,Li, ZM.,...&Hu, YL.(2014).Analysis and design of resistance-wire heater in MOCVD reactor.Journal of Central South University,Vol.21 No.9,3518-3524. |
| MLA | Qu, YX,et al."Analysis and design of resistance-wire heater in MOCVD reactor".Journal of Central South University Vol.21 No.9(2014):3518-3524. |
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