Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application

	Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application
	Shi YB (Shi, Yunbo) ; Guo H (Guo, Hao) ; Ni HQ (Ni, Haiqiao) ; Xue CY (Xue, Chenyang) ; Niu ZC (Niu, Zhichuan) ; Tang J (Tang, Jun) ; Liu J (Liu, Jun) ; Zhang WD (Zhang, Wendong) ; He JF (He, Jifang) ; Li MF (Li, Mifeng) ; Yu Y (Yu, Ying)
刊名	materials
	2012
卷号	5 期号:12 页码:2917-2926
学科主题	半导体物理
收录类别	SCI
语种	英语
公开日期	2013-03-26
内容类型	期刊论文
源URL	[http://ir.semi.ac.cn/handle/172111/23768]
专题	半导体研究所_半导体超晶格国家重点实验室
推荐引用方式 GB/T 7714	Shi YB ,Guo H ,Ni HQ ,et al. Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application[J]. materials,2012,5(12):2917-2926.
APA	Shi YB .,Guo H .,Ni HQ .,Xue CY .,Niu ZC .,...&Yu Y .(2012).Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application.materials,5(12),2917-2926.
MLA	Shi YB ,et al."Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application".materials 5.12(2012):2917-2926.