Active disturbance rejection control design for fast AFM | |
Chen, D.; Yin, B.; Liu, J.; Li, W.; Wu, L.; Li, H. | |
刊名 | Key Engineering Materials
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2015 | |
卷号 | 645页码:670-674 |
关键词 | Atomic force microscopy Discrete time control systems Three term control systems Traction control Nanotechnology Active disturbance rejection control design Active disturbance rejection controls Contact modes Control problems External disturbances Fast scan Process parameter variations System vibrations Disturbance rejection |
ISSN号 | 10139826 |
DOI | 10.4028/www.scientific.net/KEM.645-646.670 |
URL标识 | 查看原文 |
收录类别 | EI |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/5961330 |
专题 | 北京航空航天大学 |
推荐引用方式 GB/T 7714 | Chen, D.,Yin, B.,Liu, J.,et al. Active disturbance rejection control design for fast AFM[J]. Key Engineering Materials,2015,645:670-674. |
APA | Chen, D.,Yin, B.,Liu, J.,Li, W.,Wu, L.,&Li, H..(2015).Active disturbance rejection control design for fast AFM.Key Engineering Materials,645,670-674. |
MLA | Chen, D.,et al."Active disturbance rejection control design for fast AFM".Key Engineering Materials 645(2015):670-674. |
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