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	Theoretical and experimental research on the in-plane comb-shaped capacitor for MEMS coriolis mass flow sensor
	Hu, Chun; Zheng, Dezhi; Fan, Shangchun; Wiegerink, Remco John; Guo Zhanshe
刊名	MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
	2016
卷号	22页码:747-755
ISSN号	0946-7076
DOI	10.1007/s00542-015-2441-7
URL标识	查看原文
收录类别	SCIE ; EI
WOS记录号	WOS:000372757400009
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5958585
专题	北京航空航天大学
推荐引用方式 GB/T 7714	Hu, Chun,Zheng, Dezhi,Fan, Shangchun,et al. Theoretical and experimental research on the in-plane comb-shaped capacitor for MEMS coriolis mass flow sensor[J]. MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,2016,22:747-755.
APA	Hu, Chun,Zheng, Dezhi,Fan, Shangchun,Wiegerink, Remco John,&Guo Zhanshe.(2016).Theoretical and experimental research on the in-plane comb-shaped capacitor for MEMS coriolis mass flow sensor.MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS,22,747-755.
MLA	Hu, Chun,et al."Theoretical and experimental research on the in-plane comb-shaped capacitor for MEMS coriolis mass flow sensor".MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS 22(2016):747-755.

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