| Ultrasonic vibration mill-grinding of single-crystal silicon carbide for pressure sensor diaphragms | |
| Li, Jian; Geng, Daxi; Zhang, Deyuan; Qin, Wei; Jiang, Yonggang | |
| 刊名 | CERAMICS INTERNATIONAL
 |
| 2018 | |
| 卷号 | 44页码:3107-3112 |
| 关键词 | Silicon carbide Ultrasonic vibration Mill-grinding Diaphragm Pressure sensor |
| ISSN号 | 0272-8842 |
| DOI | 10.1016/j.ceramint.2017.11.077 |
| URL标识 | 查看原文 |
| 收录类别 | SCIE ; EI |
| WOS记录号 | WOS:000423891900063 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5935591 |
| 专题 | 北京航空航天大学 |
| 推荐引用方式 GB/T 7714 | Li, Jian,Geng, Daxi,Zhang, Deyuan,et al. Ultrasonic vibration mill-grinding of single-crystal silicon carbide for pressure sensor diaphragms[J]. CERAMICS INTERNATIONAL,2018,44:3107-3112. |
| APA | Li, Jian,Geng, Daxi,Zhang, Deyuan,Qin, Wei,&Jiang, Yonggang.(2018).Ultrasonic vibration mill-grinding of single-crystal silicon carbide for pressure sensor diaphragms.CERAMICS INTERNATIONAL,44,3107-3112. |
| MLA | Li, Jian,et al."Ultrasonic vibration mill-grinding of single-crystal silicon carbide for pressure sensor diaphragms".CERAMICS INTERNATIONAL 44(2018):3107-3112. |
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