| Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing | |
| Yu, Mingxing; Lv, Pin; Xu, Tiantong; Tan, Xiao; Li, Haiwang | |
| 刊名 | MICROMACHINES
 |
| 2018 | |
| 卷号 | 9 |
| 关键词 | micro air bearing silicon dioxide film DRIE etch wet etch bonding power MEMS |
| ISSN号 | 2072-666X |
| DOI | 10.3390/mi9040166 |
| URL标识 | 查看原文 |
| 收录类别 | SCIE ; PUBMED |
| WOS记录号 | WOS:000434880200028 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5933334 |
| 专题 | 北京航空航天大学 |
| 推荐引用方式 GB/T 7714 | Yu, Mingxing,Lv, Pin,Xu, Tiantong,et al. Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing[J]. MICROMACHINES,2018,9. |
| APA | Yu, Mingxing,Lv, Pin,Xu, Tiantong,Tan, Xiao,&Li, Haiwang.(2018).Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing.MICROMACHINES,9. |
| MLA | Yu, Mingxing,et al."Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing".MICROMACHINES 9(2018). |
| 个性服务 |
| 查看访问统计 |
| 相关权益政策 |
| 暂无数据 |
| 收藏/分享 |
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论