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Effect of of DC bias and RF self-bias on the structure and properties of chromium oxide coatings prepared by vacuum cathodic arc deposition
Huang, Kai; Li, LiuHe; Wang, Lei; Li, GuoDong; Xu, Ye
刊名VACUUM
2019
卷号164页码:325-331
关键词Cr2O3 Bias Microstructure Preferred orientation Nano-hardness
ISSN号0042-207X
DOI10.1016/j.vacuum.2019.03.024
URL标识查看原文
收录类别SCIE ; EI
WOS记录号WOS:000467510900050
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/5921248
专题北京航空航天大学
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GB/T 7714
Huang, Kai,Li, LiuHe,Wang, Lei,et al. Effect of of DC bias and RF self-bias on the structure and properties of chromium oxide coatings prepared by vacuum cathodic arc deposition[J]. VACUUM,2019,164:325-331.
APA Huang, Kai,Li, LiuHe,Wang, Lei,Li, GuoDong,&Xu, Ye.(2019).Effect of of DC bias and RF self-bias on the structure and properties of chromium oxide coatings prepared by vacuum cathodic arc deposition.VACUUM,164,325-331.
MLA Huang, Kai,et al."Effect of of DC bias and RF self-bias on the structure and properties of chromium oxide coatings prepared by vacuum cathodic arc deposition".VACUUM 164(2019):325-331.
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