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	Structural, electrical and optical properties of ITO films with a thin TiO2 seed layer prepared by RF magnetron sputtering
	Song, Shumei; Yang, Tianlin; Li, Yanhui; Pang, ZhiYong; Lin, Liang; Lv, Maoshui; Han, Shenghao
刊名	Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology
	2009
卷号	83期号:8页码:1091-1094
关键词	ITO TiO2 seed layer Resistivity Transmittance
DOI	10.1016/j.vacuum.2009.01.003
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/5530045
专题	山东大学
作者单位	School of Space Science and Physics, Shandong University at Weihai, Weihai, 264209 Shandong, China, School of Physics, State Key Laboratory
推荐引用方式 GB/T 7714	Song, Shumei,Yang, Tianlin,Li, Yanhui,et al. Structural, electrical and optical properties of ITO films with a thin TiO2 seed layer prepared by RF magnetron sputtering[J]. Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2009,83(8):1091-1094.
APA	Song, Shumei.,Yang, Tianlin.,Li, Yanhui.,Pang, ZhiYong.,Lin, Liang.,...&Han, Shenghao.(2009).Structural, electrical and optical properties of ITO films with a thin TiO2 seed layer prepared by RF magnetron sputtering.Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,83(8),1091-1094.
MLA	Song, Shumei,et al."Structural, electrical and optical properties of ITO films with a thin TiO2 seed layer prepared by RF magnetron sputtering".Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology 83.8(2009):1091-1094.

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