Manufacturable multi-emitter laser diode | |
STEIGERWALD, DAN; MCLAURIN, MELVIN; GOUTAIN, ERIC; SZTEIN, ALEXANDER; HSU, PO SHAN; RUDY, PAUL; RARING, JAMES W. | |
2016-12-13 | |
著作权人 | SORAA LASER DIODE, INC. |
专利号 | US9520697 |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Manufacturable multi-emitter laser diode |
英文摘要 | A method for manufacturing a multi-emitter laser diode device includes providing a substrate having a surface region and forming epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active layer region. The epitaxial material is patterned to form a plurality of dice, each of the dice corresponding to at least one laser device, characterized by a first pitch between a pair of dice, the first pitch being less than a design width. Each of the plurality of dice are transferred to a carrier wafer such that each pair of dice is configured with a second pitch between each pair of dice, the second pitch being larger than the first pitch. |
公开日期 | 2016-12-13 |
申请日期 | 2015-01-20 |
状态 | 授权 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/41857] |
专题 | 半导体激光器专利数据库 |
作者单位 | SORAA LASER DIODE, INC. |
推荐引用方式 GB/T 7714 | STEIGERWALD, DAN,MCLAURIN, MELVIN,GOUTAIN, ERIC,et al. Manufacturable multi-emitter laser diode. US9520697. 2016-12-13. |
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