Manufacturable multi-emitter laser diode
STEIGERWALD, DAN; MCLAURIN, MELVIN; GOUTAIN, ERIC; SZTEIN, ALEXANDER; HSU, PO SHAN; RUDY, PAUL; RARING, JAMES W.
2016-12-13
著作权人SORAA LASER DIODE, INC.
专利号US9520697
国家美国
文献子类授权发明
其他题名Manufacturable multi-emitter laser diode
英文摘要A method for manufacturing a multi-emitter laser diode device includes providing a substrate having a surface region and forming epitaxial material overlying the surface region, the epitaxial material comprising an n-type cladding region, an active region comprising at least one active layer overlying the n-type cladding region, and a p-type cladding region overlying the active layer region. The epitaxial material is patterned to form a plurality of dice, each of the dice corresponding to at least one laser device, characterized by a first pitch between a pair of dice, the first pitch being less than a design width. Each of the plurality of dice are transferred to a carrier wafer such that each pair of dice is configured with a second pitch between each pair of dice, the second pitch being larger than the first pitch.
公开日期2016-12-13
申请日期2015-01-20
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/41857]  
专题半导体激光器专利数据库
作者单位SORAA LASER DIODE, INC.
推荐引用方式
GB/T 7714
STEIGERWALD, DAN,MCLAURIN, MELVIN,GOUTAIN, ERIC,et al. Manufacturable multi-emitter laser diode. US9520697. 2016-12-13.
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