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	Integration of laser with photodiode for feedback control
	SWIRHUN, STANLEY E.; QUINN, WILLIAM E.
	1996-11-19
著作权人	VIXEL CORPORATION
专利号	US5577064
国家	美国
文献子类	授权发明
其他题名	Integration of laser with photodiode for feedback control
英文摘要	Photodiodes are integrally formed with vertical cavity surface emitting lasers (VCSELs) and superluminescent light emitting diodes (SLEDs) for monitoring optical radiation intensities. In different embodiments, the photodiode is epitaxially formed within a mirror of a VCSEL, non-epitaxially formed on top of a VCSEL, non-epitaxially formed on side of a VCSEL, or formed on the substrate on the side opposite the VCSEL. A lateral injection vertical cavity surface emitting laser is also disclosed for integration with a lateral PIN photodiode. A photodiode having the same epitaxial layers as a VCSEL is also integrally formed alongside of the VCSEL. Similar devices using SLEDs are also disclosed.
公开日期	1996-11-19
申请日期	1995-10-18
状态	失效
内容类型	专利
源URL	[http://ir.opt.ac.cn/handle/181661/40747]
专题	半导体激光器专利数据库
作者单位	VIXEL CORPORATION
推荐引用方式 GB/T 7714	SWIRHUN, STANLEY E.,QUINN, WILLIAM E.. Integration of laser with photodiode for feedback control. US5577064. 1996-11-19.

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