Group III-V complex vertical cavity surface emitting laser diode and method for manufacturing the same
KIM, TAEK
2001-10-23
著作权人SAMSUNG ELECTRONICS CO., LTD.
专利号US6306672
国家美国
文献子类授权发明
其他题名Group III-V complex vertical cavity surface emitting laser diode and method for manufacturing the same
英文摘要A Group III-V complex vertical cavity surface emitting laser (VCSEL) diode manufactured using GaN-system III-V nitride, and a method of manufacturing the same, are provided. The Group III-V complex surface emitting laser diode can obtain a sufficient reflectance even with a small number of pairs of a distributed bragg reflector (DBR), by forming DBRs including air layers. Thus, the crystal growth problem is solved. Also, current confinement and waveguiding are realized by AIN lateral oxidation or etching.
公开日期2001-10-23
申请日期1998-07-23
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/40038]  
专题半导体激光器专利数据库
作者单位SAMSUNG ELECTRONICS CO., LTD.
推荐引用方式
GB/T 7714
KIM, TAEK. Group III-V complex vertical cavity surface emitting laser diode and method for manufacturing the same. US6306672. 2001-10-23.
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