Optical sensor for sensing temperature of an adjacent gas
ARNOLD PETER ROSCOE HARPIN; STEPHEN JAMES FASHAM
2016-08-31
著作权人OXSENSIS LTD
专利号GB2495518B
国家英国
文献子类授权发明
其他题名Optical sensor for sensing temperature of an adjacent gas
英文摘要Optical sensor 10 comprises a substrate 12; sensing waveguide structure 16 and delivery waveguide 18, each formed integrally with the substrate; and an aperture 30 in the substrate under part of the sensing waveguide structure. The delivery waveguide allows delivery of interrogating probe light 22 into the sensing waveguide structure such that the optical sensor may sense an adjacent gas temperature. The aperture reduces thermal coupling between the substrate and the sensing waveguide structure, e.g. providing faster response to temperature changes. Alternatively a carrier chip (84, Fig.10) supports an optical fibre (25, Fig.10) in a groove (86, Fig.10) in its surface, the surface being in contact with a substrate (12, Fig.10) comprising an integrally formed waveguide such that the optical fibre core is aligned with an end of the waveguide. The sensing waveguide may be a Fabry-Perot or Bragg grating interferometer element.
公开日期2016-08-31
申请日期2011-10-12
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/37553]  
专题半导体激光器专利数据库
作者单位OXSENSIS LTD
推荐引用方式
GB/T 7714
ARNOLD PETER ROSCOE HARPIN,STEPHEN JAMES FASHAM. Optical sensor for sensing temperature of an adjacent gas. GB2495518B. 2016-08-31.
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