Dicing die bond film and method of manufacturing semiconductor device | |
TANAKA, SHUMPEI; MATSUMURA, TAKESHI | |
2015-09-22 | |
著作权人 | NITTO DENKO CORPORATION |
专利号 | US9142457 |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Dicing die bond film and method of manufacturing semiconductor device |
英文摘要 | The present invention provides a dicing die bond film in which yielding and breaking of the dicing film are prevented and in which the die bond film can be suitably broken with a tensile force. In the dicing die bond film of the present invention, the tensile strength of the contact part in which the outer circumference of the push-up jig contacts the dicing film at 25° C. is 15 N or more and 80 N or less and the yield point elongation is 80% or more, the tensile strength of the wafer bonding part of the dicing film at 25° C. is 10 N or more and 70 N or less and the yield point elongation is 30% or more, [(the tensile strength of the contact part)−(the tensile strength of the wafer bonding part)] is 0 N or more and 60 N or less, and the breaking elongation rate of the die bond film at 25° C. is more than 40% and 500% or less. |
公开日期 | 2015-09-22 |
申请日期 | 2011-09-21 |
状态 | 失效 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/37546] |
专题 | 半导体激光器专利数据库 |
作者单位 | NITTO DENKO CORPORATION |
推荐引用方式 GB/T 7714 | TANAKA, SHUMPEI,MATSUMURA, TAKESHI. Dicing die bond film and method of manufacturing semiconductor device. US9142457. 2015-09-22. |
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