Substrate for device bonding and method for manufacturing same
YOKOYAMA, HIROKI
2009-12-01
著作权人TOKUYAMA CORPORATION
专利号US7626264
国家美国
文献子类授权发明
其他题名Substrate for device bonding and method for manufacturing same
英文摘要A substrate for device bonding is provided, which enables bonding of a device with high bond strength to an Au electrode formed on a substrate such as aluminum nitride by soldering the device at a low temperature using a soft solder metal having a low melting point such as an Au—Sn-based solder having an Au content of 10% by weight. The substrate for device bonding comprises a substrate having an Au electrode layer formed on its surface and in which (i) a layer composed of a platinum group element, (ii) a layer composed of at least one transition metal element selected from the group consisting of Ti, V, Cr and Co, (iii) a barrier metal layer composed of at least one metal selected from the group consisting of Ag, Cu and Ni and (iv) a solder layer composed of a solder containing Sn or In as a main component are laminated in this order on the Au electrode layer.
公开日期2009-12-01
申请日期2005-03-24
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/37136]  
专题半导体激光器专利数据库
作者单位TOKUYAMA CORPORATION
推荐引用方式
GB/T 7714
YOKOYAMA, HIROKI. Substrate for device bonding and method for manufacturing same. US7626264. 2009-12-01.
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