Optical displacement sensor having a semiconductor laser light source using an optical element which can control beam angle and a beam shape
KOMAZAKI, IWAO; YAMAMOTO, EIJI
2003-10-07
著作权人OLYMPUS OPTICAL CO., LTD.
专利号US6631005
国家美国
文献子类授权发明
其他题名Optical displacement sensor having a semiconductor laser light source using an optical element which can control beam angle and a beam shape
英文摘要An optical displacement sensor includes a laser light source, a scale, a photodetector, and an optical element which refracts light beams to the scale. The scale is displaced in a fashion traversing the light beams and includes a periodic pattern formed thereon to generate a diffractive interference pattern from the light beams. The photodetector receives at least a portion of the pattern and includes a photodetector array comprising plural light receiving areas having a period of np1 (z1+z2)/z1 in a pitch direction of the pattern on a surface of the photodetector. A distance between an emission surface of the laser light source and a surface of the scale is defined as z A distance between the surface of the scale and a light receiving surface of the photodetector is defined as z2. A pitch of the periodic pattern is defined as p1, and n denotes a natural number.
公开日期2003-10-07
申请日期2000-05-30
状态失效
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/35350]  
专题半导体激光器专利数据库
作者单位OLYMPUS OPTICAL CO., LTD.
推荐引用方式
GB/T 7714
KOMAZAKI, IWAO,YAMAMOTO, EIJI. Optical displacement sensor having a semiconductor laser light source using an optical element which can control beam angle and a beam shape. US6631005. 2003-10-07.
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