Optical displacement sensor having a semiconductor laser light source using an optical element which can control beam angle and a beam shape | |
KOMAZAKI, IWAO; YAMAMOTO, EIJI | |
2003-10-07 | |
著作权人 | OLYMPUS OPTICAL CO., LTD. |
专利号 | US6631005 |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Optical displacement sensor having a semiconductor laser light source using an optical element which can control beam angle and a beam shape |
英文摘要 | An optical displacement sensor includes a laser light source, a scale, a photodetector, and an optical element which refracts light beams to the scale. The scale is displaced in a fashion traversing the light beams and includes a periodic pattern formed thereon to generate a diffractive interference pattern from the light beams. The photodetector receives at least a portion of the pattern and includes a photodetector array comprising plural light receiving areas having a period of np1 (z1+z2)/z1 in a pitch direction of the pattern on a surface of the photodetector. A distance between an emission surface of the laser light source and a surface of the scale is defined as z A distance between the surface of the scale and a light receiving surface of the photodetector is defined as z2. A pitch of the periodic pattern is defined as p1, and n denotes a natural number. |
公开日期 | 2003-10-07 |
申请日期 | 2000-05-30 |
状态 | 失效 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/35350] |
专题 | 半导体激光器专利数据库 |
作者单位 | OLYMPUS OPTICAL CO., LTD. |
推荐引用方式 GB/T 7714 | KOMAZAKI, IWAO,YAMAMOTO, EIJI. Optical displacement sensor having a semiconductor laser light source using an optical element which can control beam angle and a beam shape. US6631005. 2003-10-07. |
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