Method of manufacture for an ultraviolet laser diode | |
RARING, JAMES W.; MCLAURIN, MELVIN; RUDY, PAUL; HSU, PO SHAN; SZTEIN, ALEXANDER | |
2019-01-29 | |
著作权人 | SORAA LASER DIODE, INC. |
专利号 | US10193309 |
国家 | 美国 |
文献子类 | 授权发明 |
其他题名 | Method of manufacture for an ultraviolet laser diode |
英文摘要 | A method for fabricating a laser diode device includes providing a gallium and nitrogen containing substrate member comprising a surface region, a release material overlying the surface region, an n-type gallium and nitrogen containing material; an active region overlying the n-type gallium and nitrogen containing material, a p-type gallium and nitrogen containing material; and a first transparent conductive oxide material overlying the p-type gallium and nitrogen containing material, and an interface region overlying the first transparent conductive oxide material. The method includes bonding the interface region to a handle substrate and subjecting the release material to an energy source to initiate release of the gallium and nitrogen containing substrate member. |
公开日期 | 2019-01-29 |
申请日期 | 2017-06-02 |
状态 | 授权 |
内容类型 | 专利 |
源URL | [http://ir.opt.ac.cn/handle/181661/32351] |
专题 | 半导体激光器专利数据库 |
作者单位 | SORAA LASER DIODE, INC. |
推荐引用方式 GB/T 7714 | RARING, JAMES W.,MCLAURIN, MELVIN,RUDY, PAUL,et al. Method of manufacture for an ultraviolet laser diode. US10193309. 2019-01-29. |
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