Method of manufacture for an ultraviolet laser diode
RARING, JAMES W.; MCLAURIN, MELVIN; RUDY, PAUL; HSU, PO SHAN; SZTEIN, ALEXANDER
2019-01-29
著作权人SORAA LASER DIODE, INC.
专利号US10193309
国家美国
文献子类授权发明
其他题名Method of manufacture for an ultraviolet laser diode
英文摘要A method for fabricating a laser diode device includes providing a gallium and nitrogen containing substrate member comprising a surface region, a release material overlying the surface region, an n-type gallium and nitrogen containing material; an active region overlying the n-type gallium and nitrogen containing material, a p-type gallium and nitrogen containing material; and a first transparent conductive oxide material overlying the p-type gallium and nitrogen containing material, and an interface region overlying the first transparent conductive oxide material. The method includes bonding the interface region to a handle substrate and subjecting the release material to an energy source to initiate release of the gallium and nitrogen containing substrate member.
公开日期2019-01-29
申请日期2017-06-02
状态授权
内容类型专利
源URL[http://ir.opt.ac.cn/handle/181661/32351]  
专题半导体激光器专利数据库
作者单位SORAA LASER DIODE, INC.
推荐引用方式
GB/T 7714
RARING, JAMES W.,MCLAURIN, MELVIN,RUDY, PAUL,et al. Method of manufacture for an ultraviolet laser diode. US10193309. 2019-01-29.
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