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	Multifunctional probe for diagnosing plasma, has probe work mode switched by controlling relay action using output level of digital signal output terminal, and signal input terminal that obtains voltage and current signals of probe.
	DENG X DONG C FAN P LU W QIU D WANG
	2010
公开日期	2010-02-17
URL标识	查看原文
申请日期	2009-09-09
内容类型	专利
URI标识	http://www.corc.org.cn/handle/1471x/5282863
专题	大连理工大学
作者单位	UNIV DALIAN TECHNOLOGY NISSIN ELECTRIC DALIAN TECHNOLOGY DEV CO (NISS-Non-standard
推荐引用方式 GB/T 7714	DENG X DONG C FAN P LU W QIU D WANG. Multifunctional probe for diagnosing plasma, has probe work mode switched by controlling relay action using output level of digital signal output terminal, and signal input terminal that obtains voltage and current signals of probe.. 2010-01-01.

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