| Study of application of high power pulsed unbalanced magnetron sputtering technology for thin film deposition | |
| Mou ZX(牟宗信) | |
| 2010 | |
| 会议名称 | International Conference on Power Beam Processing Technologies (ICPBPT 2010) |
| 会议录 | International Conference on Power Beam Processing Technologies (ICPBPT 2010)
 |
| URL标识 | 查看原文 |
| 内容类型 | 会议论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/5279466 |
| 专题 | 大连理工大学 |
| 推荐引用方式 GB/T 7714 | Mou ZX. Study of application of high power pulsed unbalanced magnetron sputtering technology for thin film deposition[C]. 见:International Conference on Power Beam Processing Technologies (ICPBPT 2010). |
| 个性服务 |
| 查看访问统计 |
| 相关权益政策 |
| 暂无数据 |
| 收藏/分享 |
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论