Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon ﬁlms synthesized by magnetron sputtering

CORC > 兰州化学物理研究所 > 中国科学院兰州化学物理研究所 > 固体润滑国家重点实验室

	Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon ﬁlms synthesized by magnetron sputtering
	Zhang GA(张广安); Wang LP(王立平); Xue QJ(薛群基)
刊名	Surface and Coatings Technology
	2010
卷号	205 页码:793-800
关键词	Graphite-like carbon (GLC) ﬁlm Bias voltage Microstructure Water environment Tribological property
ISSN号	0257-8972
通讯作者	王立平
中文摘要	Ti-doped graphite-like carbon (GLC) ﬁlms with different microstructures and compositions were fabricatedusing magnetron sputtering technique. The inﬂuence of bias voltages on microstructure, hardness, internalstress, adhesion strength and tribological properties of the as-deposited GLC ﬁlms were systemicallyinvestigated. The results showed that with increasing bias voltage, the graphite-like structure component(sp2bond) in the GLC ﬁlms increased, and the ﬁlms gradually became much smoother and denser. Thenanohardness and compressive internal stress increased signiﬁcantly with the increase of bias voltage up to−300 V and were constant after −400 V. GLC ﬁlms deposited with bias voltages in the range of -300–-400 Vexhibited optimum adhesion strength with the substrates. Both the friction coefﬁcients and the wear rates ofGLC ﬁlms in ambient air and water decreased with increasing voltages in the lower bias range (0–-300 V)however, they were constant for higher bias values (beyond −300 V) . In addition, the wear rate of GLC ﬁlmsunder water-lubricated condition was signiﬁcantly higher for voltages below −300 V but lower at highvoltage than that under dry friction condition. The excellent tribological performance of Ti-doped GLC ﬁlmsprepared at higher bias voltages of −300–-400 V are attributed to their high hardness, tribo-inducedlubricating top-layers and planar (2D) graphite-like structure.
学科主题	材料科学与物理化学
收录类别	SCI
资助信息	National Natural Science Foundation of China (No. 50905178 & 50823008);the 863 Programof Chinese Ministry of Science and Technology (No. 2009AA03Z105)
语种	英语
公开日期	2012-09-28
内容类型	期刊论文
源URL	[http://210.77.64.217/handle/362003/1062]
专题	兰州化学物理研究所_固体润滑国家重点实验室
通讯作者	Wang LP(王立平)
推荐引用方式 GB/T 7714	Zhang GA,Wang LP,Xue QJ. Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon ﬁlms synthesized by magnetron sputtering[J]. Surface and Coatings Technology,2010,205:793-800.
APA	张广安,王立平,&薛群基.(2010).Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon ﬁlms synthesized by magnetron sputtering.Surface and Coatings Technology,205,793-800.
MLA	张广安,et al."Effect of bias voltage on microstructure and properties of Ti-doped graphite-like carbon ﬁlms synthesized by magnetron sputtering".Surface and Coatings Technology 205(2010):793-800.