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	Studies of the composition and properties of silicon nitride thin films deposited by mid-frequency dual-target unbalanced magnetron sputtering
	Mou ZX(牟宗信)
刊名	材料科学与工程学报
	2011
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4849811
专题	大连理工大学
推荐引用方式 GB/T 7714	Mou ZX. Studies of the composition and properties of silicon nitride thin films deposited by mid-frequency dual-target unbalanced magnetron sputtering[J]. 材料科学与工程学报,2011.
APA	Mou ZX.(2011).Studies of the composition and properties of silicon nitride thin films deposited by mid-frequency dual-target unbalanced magnetron sputtering.材料科学与工程学报.
MLA	Mou ZX."Studies of the composition and properties of silicon nitride thin films deposited by mid-frequency dual-target unbalanced magnetron sputtering".材料科学与工程学报 (2011).

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