| A new semi-analytical method analyzing the magnetic field in unbalanced magnetron sputtering system | |
| Han, Liang; Zhao, YuQing; Wang, YanWu | |
| 刊名 | VACUUM
 |
| 2009 | |
| 卷号 | 83期号:11页码:1317-1320 |
| 关键词 | Magnetic field Semi-analytical method Unbalanced magnetron sputtering |
| ISSN号 | 0042-207X |
| DOI | 10.1016/j.vacuum.2009.04.040 |
| URL标识 | 查看原文 |
| WOS记录号 | WOS:000268387800003 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4838456 |
| 专题 | 西安交通大学 |
| 推荐引用方式 GB/T 7714 | Han, Liang,Zhao, YuQing,Wang, YanWu. A new semi-analytical method analyzing the magnetic field in unbalanced magnetron sputtering system[J]. VACUUM,2009,83(11):1317-1320. |
| APA | Han, Liang,Zhao, YuQing,&Wang, YanWu.(2009).A new semi-analytical method analyzing the magnetic field in unbalanced magnetron sputtering system.VACUUM,83(11),1317-1320. |
| MLA | Han, Liang,et al."A new semi-analytical method analyzing the magnetic field in unbalanced magnetron sputtering system".VACUUM 83.11(2009):1317-1320. |
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