| Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct current | |
| Mu Zong-Xin; Mu Xiao-Dong; Wang Chun; Jia Li; Dong Chuang | |
| 刊名 | ACTA PHYSICA SINICA
 |
| 2011 | |
| 卷号 | 60页码:- |
| 关键词 | discharge pulse technology |
| ISSN号 | 1000-3290 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4837824 |
| 专题 | 大连理工大学 |
| 作者单位 | Dalian Univ Technol, Key Lab M7aterials Modificat Laser Ion & Electron, Minist Educ, Sch Phys & Optoeleet Technol, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Mu Zong-Xin,Mu Xiao-Dong,Wang Chun,et al. Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct current[J]. ACTA PHYSICA SINICA,2011,60:-. |
| APA | Mu Zong-Xin,Mu Xiao-Dong,Wang Chun,Jia Li,&Dong Chuang.(2011).Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct current.ACTA PHYSICA SINICA,60,-. |
| MLA | Mu Zong-Xin,et al."Analysis on the ionization of high power pulsed unbalanced magnetron sputtering powered by direct current".ACTA PHYSICA SINICA 60(2011):-. |
| 个性服务 |
| 查看访问统计 |
| 相关权益政策 |
| 暂无数据 |
| 收藏/分享 |
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论