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Modeling and control of a novel X-Y parallel piezoelectric-actuator driven nanopositioner
Liu, Pengbo; Yan, Peng; Zhang, Zhen; Leng, Tongtong
刊名ISA TRANSACTIONS
2015
卷号56页码:145-154
关键词Nanopositioner Hysteresis Control saturation H-infinity controller Anti-windup compensator
DOI10.1016/j.isatra.2014.10.005
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4788266
专题山东大学
作者单位Shandong Univ, Sch Mech Engn, Key Lab Highefficiency & Clean Mech Mfg, Minishy Educ, Jinan 250061, Shandong,
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GB/T 7714
Liu, Pengbo,Yan, Peng,Zhang, Zhen,et al. Modeling and control of a novel X-Y parallel piezoelectric-actuator driven nanopositioner[J]. ISA TRANSACTIONS,2015,56:145-154.
APA Liu, Pengbo,Yan, Peng,Zhang, Zhen,&Leng, Tongtong.(2015).Modeling and control of a novel X-Y parallel piezoelectric-actuator driven nanopositioner.ISA TRANSACTIONS,56,145-154.
MLA Liu, Pengbo,et al."Modeling and control of a novel X-Y parallel piezoelectric-actuator driven nanopositioner".ISA TRANSACTIONS 56(2015):145-154.
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