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Fabrication of Fabry-Perot-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process
Wang, YS; Zhu, XP; Chen, YQ; Shi, HM; Li, ZQ; Zhang, S; Liu, Q; Li, YT; Xiang, Q; Duan, HG
刊名JOURNAL OF MICROMECHANICS AND MICROENGINEERING
2019
卷号Vol.29 No.2
关键词color filter array micro-reflow PMMA monolithic stepwise dielectric layer Fabry-Perot resonator
ISSN号0960-1317
URL标识查看原文
公开日期[db:dc_date_available]
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4738769
专题湖南大学
作者单位1.Hunan Univ, State Key Lab Adv Design & Mfg Vehicle Body, Coll Mech & Vehicle Engn, Changsha 410082, Hunan, Peoples R China
2.Lingnan Normal Univ, Sch Phys Sci & Technol, Zhanjiang 524048, Peoples R China
3.Hunan Univ, Sch Phys & Elect, Changsha 410082, Hunan, Peoples R China
4.Chinese Acad Sci, Inst Microelect, Beijing 100029, Peoples R China
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GB/T 7714
Wang, YS,Zhu, XP,Chen, YQ,et al. Fabrication of Fabry-Perot-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2019,Vol.29 No.2.
APA Wang, YS.,Zhu, XP.,Chen, YQ.,Shi, HM.,Li, ZQ.,...&Duan, HG.(2019).Fabrication of Fabry-Perot-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,Vol.29 No.2.
MLA Wang, YS,et al."Fabrication of Fabry-Perot-cavity-based monolithic full-color filter arrays using a template-confined micro-reflow process".JOURNAL OF MICROMECHANICS AND MICROENGINEERING Vol.29 No.2(2019).
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