| A study of structure and properties of Ti-doped DLC film by reactive magnetron sputtering with ion implantation | |
| Ma, Guojia; Gong, Shuili; Lin, Guoqiang; Zhang, Lin; Sun, Gang | |
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 2012 | |
| 卷号 | 258页码:3045-3050 |
| 关键词 | Ti doping DLC Ion implantation Adhesion Hydrophobic property |
| ISSN号 | 0169-4332 |
| URL标识 | 查看原文 |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/4666985 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.Dalian Univ Technol, Dept Phys & Optoelect Technol, Dalian 116024, Peoples R China. 2.Beijing Aeronaut Mfg Technol Res Inst, Natl Key Lab Sci & Technol Power Beam Proc, Beijing 100024, Peoples R China. 3.Beijing Aeronaut Mfg Technol Res Inst, Natl Key Lab Sci & Technol Power Beam Proc, Beijing 100024, Peoples R China. 4.Dalian Univ Technol, Dept Phys & Optoelect Technol, Dalian 116024, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Ma, Guojia,Gong, Shuili,Lin, Guoqiang,et al. A study of structure and properties of Ti-doped DLC film by reactive magnetron sputtering with ion implantation[J]. APPLIED SURFACE SCIENCE,2012,258:3045-3050. |
| APA | Ma, Guojia,Gong, Shuili,Lin, Guoqiang,Zhang, Lin,&Sun, Gang.(2012).A study of structure and properties of Ti-doped DLC film by reactive magnetron sputtering with ion implantation.APPLIED SURFACE SCIENCE,258,3045-3050. |
| MLA | Ma, Guojia,et al."A study of structure and properties of Ti-doped DLC film by reactive magnetron sputtering with ion implantation".APPLIED SURFACE SCIENCE 258(2012):3045-3050. |
| 个性服务 |
| 查看访问统计 |
| 相关权益政策 |
| 暂无数据 |
| 收藏/分享 |
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。
修改评论