An improved, real-time method for removing the cyclic error of a homodyne interferometer

CORC > 西安光学精密机械研究所 > 中国科学院西安光学精密机械研究所 > 瞬态光学技术国家重点实验室

	An improved, real-time method for removing the cyclic error of a homodyne interferometer
	ZhaoSuwen ; WenDesheng ; ZhuShaolan ; LiangShitong
	2011
会议名称	international symposium on photoelectronic detection and imaging 2012: laser sensing and imaging; and biological and medical applications of photonics sensing and imaging
会议日期	may 24, 2011 - may 26, 2017
会议地点	beijing, china
关键词	single frequency laser interferometer error correction real-time compensation Lissajous figure
页码	81924g
通讯作者	zhao suwen
英文摘要	the nonlinear error of a homodyne interferometer is presented: the amplitudes, the phase and the offsets. an improved compensation method is introduced since the conventional heydeman modal' calculation is very time-consuming. first, the "zero drift" problem is solved with the polarization phase-shifting technology; second, a fast algorithm based on the heydeman method is introduced to calculate the errors; and third, electronic circuit is used to remove the nonlinear errors timely. the test result shows that the nonlinearity of the homodyne interferometer could be reduced to subnanometer over the measuring range of 20cm, and the accuracy can be improved more than tenfold by the dynamic compensation method.
收录类别	EI ; CPCI
产权排序	1
会议主办者	chinese society of astronautics (cas)
会议录	proceedings of spie - the international society for optical engineering
会议录出版者	spie
会议录出版地	p.o. box 10, bellingham, wa 98227-0021, united states
语种	英语
ISSN号	0277-786x
内容类型	会议论文
源URL	[http://ir.opt.ac.cn/handle/181661/20168]
专题	西安光学精密机械研究所_瞬态光学技术国家重点实验室
推荐引用方式 GB/T 7714	ZhaoSuwen,WenDesheng,ZhuShaolan,et al. An improved, real-time method for removing the cyclic error of a homodyne interferometer[C]. 见:international symposium on photoelectronic detection and imaging 2012: laser sensing and imaging; and biological and medical applications of photonics sensing and imaging. beijing, china. may 24, 2011 - may 26, 2017.