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	Shear Mode Bulk Acoustic Resonator Based on Inclined c-Axis AlN Film for Monitoring of Human Hemostatic Parameters
	Song, Shuren; Chen, Da; Wang, Hongfei; Li, Chaohui; Wang, Wei; Yu, Wangli; Wang, Yanyan; Guo, Qiuquan
刊名	MICROMACHINES
	2018
卷号	9期号:10
关键词	bulk acoustic wave AlN film hemostatic parameters viscosity sensor
DOI	10.3390/mi9100501
URL标识	查看原文
公开日期	[db:dc_date_available]
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4567373
专题	山东大学
作者单位	Shandong Univ Sci & Technol, Coll Elect Commun & Phys, Qingdao 266590, Peoples R China
推荐引用方式 GB/T 7714	Song, Shuren,Chen, Da,Wang, Hongfei,et al. Shear Mode Bulk Acoustic Resonator Based on Inclined c-Axis AlN Film for Monitoring of Human Hemostatic Parameters[J]. MICROMACHINES,2018,9(10).
APA	Song, Shuren.,Chen, Da.,Wang, Hongfei.,Li, Chaohui.,Wang, Wei.,...&Guo, Qiuquan.(2018).Shear Mode Bulk Acoustic Resonator Based on Inclined c-Axis AlN Film for Monitoring of Human Hemostatic Parameters.MICROMACHINES,9(10).
MLA	Song, Shuren,et al."Shear Mode Bulk Acoustic Resonator Based on Inclined c-Axis AlN Film for Monitoring of Human Hemostatic Parameters".MICROMACHINES 9.10(2018).

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