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Multiscale simulation of lateral charge loss in Si3N4 3D NAND flash based on density functional theory
Wu, Jixuan; Chen, Jiezhi; Jiang, Xiangwei
刊名Journal of Physics D: Applied Physics
2019
卷号52期号:39
DOI10.1088/1361-6463/ab2eaa
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公开日期[db:dc_date_available]
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4552236
专题山东大学
作者单位1.School of Information Science and Engineering, Shandong University, Qingdao, China
2.State Ke
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GB/T 7714
Wu, Jixuan,Chen, Jiezhi,Jiang, Xiangwei. Multiscale simulation of lateral charge loss in Si3N4 3D NAND flash based on density functional theory[J]. Journal of Physics D: Applied Physics,2019,52(39).
APA Wu, Jixuan,Chen, Jiezhi,&Jiang, Xiangwei.(2019).Multiscale simulation of lateral charge loss in Si3N4 3D NAND flash based on density functional theory.Journal of Physics D: Applied Physics,52(39).
MLA Wu, Jixuan,et al."Multiscale simulation of lateral charge loss in Si3N4 3D NAND flash based on density functional theory".Journal of Physics D: Applied Physics 52.39(2019).
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