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	Thick CrN/AlN superlattice coatings deposited by the hybrid modulated pulsed power and pulsed dc magnetron sputtering
	Lin, Jianliang; Zhang, Niingyi; Wu, Zhili; Sproul, William D.; Kaufman, Michael; Lei, Mingkai; Moore, John J.
刊名	8th Asian-European International Conference on Plasma Surface Engineering (AEPSE)
	2013
卷号	228页码:S601-S606
关键词	Modulated pulsed power (MPP) magnetron sputtering High power pulsed magnetron sputtering (HPPMS) Multilayer coating CrN/AlN coating Superlattice CrAlN
ISSN号	0257-8972
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4543941
专题	大连理工大学
作者单位	1.Colorado Sch Mines, Dept Met & Mat Engn, ACSEL, Golden, CO 80401 USA. 2.Dalian Univ Technol, Sch Mat Sci & Engn, Surface Engn Lab, Dalian 116024, Peoples R China. 3.Colorado Sch Mines, Dept Met & Mat Engn, ACSEL, Golden, CO 80401 USA. 4.React Sputtering Inc, San Marcos, CA 92078 USA.
推荐引用方式 GB/T 7714	Lin, Jianliang,Zhang, Niingyi,Wu, Zhili,et al. Thick CrN/AlN superlattice coatings deposited by the hybrid modulated pulsed power and pulsed dc magnetron sputtering[J]. 8th Asian-European International Conference on Plasma Surface Engineering (AEPSE),2013,228:S601-S606.
APA	Lin, Jianliang.,Zhang, Niingyi.,Wu, Zhili.,Sproul, William D..,Kaufman, Michael.,...&Moore, John J..(2013).Thick CrN/AlN superlattice coatings deposited by the hybrid modulated pulsed power and pulsed dc magnetron sputtering.8th Asian-European International Conference on Plasma Surface Engineering (AEPSE),228,S601-S606.
MLA	Lin, Jianliang,et al."Thick CrN/AlN superlattice coatings deposited by the hybrid modulated pulsed power and pulsed dc magnetron sputtering".8th Asian-European International Conference on Plasma Surface Engineering (AEPSE) 228(2013):S601-S606.

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