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	Numerical studies on scavenging reaction in confined etchant layer technique (CELT)
	Zhou, Ping; Kang, Renke; Shi, Kang; Guo, Dongming; Shan, Kun; Li, Zhe
刊名	JOURNAL OF ELECTROANALYTICAL CHEMISTRY
	2013
卷号	705页码:1-7
关键词	Confined etchant layer technique Micromachining Chemical etching Numerical simulation Finite element method
ISSN号	1572-6657
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4541188
专题	大连理工大学
作者单位	1.Dalian Univ Technol, Key Lab Precis & Nontradit Machining Technol, Minist Educ, Dalian 116024, Peoples R China. 2.Xiamen Univ, Dept Chem, Coll Chem & Chem Engn, Xiamen 361005, Peoples R China.
推荐引用方式 GB/T 7714	Zhou, Ping,Kang, Renke,Shi, Kang,et al. Numerical studies on scavenging reaction in confined etchant layer technique (CELT)[J]. JOURNAL OF ELECTROANALYTICAL CHEMISTRY,2013,705:1-7.
APA	Zhou, Ping,Kang, Renke,Shi, Kang,Guo, Dongming,Shan, Kun,&Li, Zhe.(2013).Numerical studies on scavenging reaction in confined etchant layer technique (CELT).JOURNAL OF ELECTROANALYTICAL CHEMISTRY,705,1-7.
MLA	Zhou, Ping,et al."Numerical studies on scavenging reaction in confined etchant layer technique (CELT)".JOURNAL OF ELECTROANALYTICAL CHEMISTRY 705(2013):1-7.

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