QQ客服 官方微博 反馈留言

	Numerical simulation of plasma immersion ion implantation on the inner surface of a cylindrical dielectric target
	Li, Yun-Hu; Li, Xue-Chun; Wang, You-Nian
刊名	SURFACE & COATINGS TECHNOLOGY
	2013
卷号	229页码:168-171
关键词	Inner surface Plasma immersion ion implantation Particle-in-cell PET Charging effects
ISSN号	0257-8972
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4540899
专题	大连理工大学
作者单位	Dalian Univ Technol, Sch Phys & Optoelect Technol, Dalian 116024, Liaoning, Peoples R China.
推荐引用方式 GB/T 7714	Li, Yun-Hu,Li, Xue-Chun,Wang, You-Nian. Numerical simulation of plasma immersion ion implantation on the inner surface of a cylindrical dielectric target[J]. SURFACE & COATINGS TECHNOLOGY,2013,229:168-171.
APA	Li, Yun-Hu,Li, Xue-Chun,&Wang, You-Nian.(2013).Numerical simulation of plasma immersion ion implantation on the inner surface of a cylindrical dielectric target.SURFACE & COATINGS TECHNOLOGY,229,168-171.
MLA	Li, Yun-Hu,et al."Numerical simulation of plasma immersion ion implantation on the inner surface of a cylindrical dielectric target".SURFACE & COATINGS TECHNOLOGY 229(2013):168-171.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。