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	Plasma Low-Pressure Nonsteady Diffusion Fluid Model for Pulsed Plasma Recovery
	Li, Yi; Zheng, Bocong; Lei, M. K.
刊名	IEEE TRANSACTIONS ON PLASMA SCIENCE
	2013
卷号	41页码:43-48
关键词	Fluid model plasma-based ion implantation (PBII) plasma diffusion plasma recovery
ISSN号	0093-3813
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4537503
专题	大连理工大学
作者单位	1.Dalian Univ Technol, Sch Mat Sci & Engn, Surface Engn Lab, Dalian 116024, Peoples R China. 2.Liaoning Univ Technol, Sch Sci, Jinzhou 121001, Peoples R China. 3.Dalian Univ Technol, Sch Mat Sci & Engn, Surface Engn Lab, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Li, Yi,Zheng, Bocong,Lei, M. K.. Plasma Low-Pressure Nonsteady Diffusion Fluid Model for Pulsed Plasma Recovery[J]. IEEE TRANSACTIONS ON PLASMA SCIENCE,2013,41:43-48.
APA	Li, Yi,Zheng, Bocong,&Lei, M. K..(2013).Plasma Low-Pressure Nonsteady Diffusion Fluid Model for Pulsed Plasma Recovery.IEEE TRANSACTIONS ON PLASMA SCIENCE,41,43-48.
MLA	Li, Yi,et al."Plasma Low-Pressure Nonsteady Diffusion Fluid Model for Pulsed Plasma Recovery".IEEE TRANSACTIONS ON PLASMA SCIENCE 41(2013):43-48.

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