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	Light elastic theory based flexible micro-probe, has basal body whose side end part is arranged with arc shaped gap to form flexible hinge stress measurement area, and micro-probe substrate provided with basal body.
	CHU J LI S MIN J ZHANG R CHEN Y
	2015
公开日期	2015-07-29
URL标识	查看原文
申请日期	2015-05-08
内容类型	专利
URI标识	http://www.corc.org.cn/handle/1471x/4413111
专题	大连理工大学
作者单位	UNIV DALIAN TECHNOLOGY (UYDA-C
推荐引用方式 GB/T 7714	CHU J LI S MIN J ZHANG R CHEN Y. Light elastic theory based flexible micro-probe, has basal body whose side end part is arranged with arc shaped gap to form flexible hinge stress measurement area, and micro-probe substrate provided with basal body.. 2015-01-01.

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