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	Double-e-type electric gun vapor deposition device, has evaporation chamber whose inner part is provided with two e-type electronic guns, where two e-type electronic guns are respectively provided with substrate and coating film material.
	JIANG D LI P TAN Y WANG D
	2015
公开日期	2015-02-18
URL标识	查看原文
申请日期	2014-11-11
内容类型	专利
URI标识	http://www.corc.org.cn/handle/1471x/4412866
专题	大连理工大学
作者单位	UNIV DALIAN TECHNOLOGY (UYDA-C
推荐引用方式 GB/T 7714	JIANG D LI P TAN Y WANG D. Double-e-type electric gun vapor deposition device, has evaporation chamber whose inner part is provided with two e-type electronic guns, where two e-type electronic guns are respectively provided with substrate and coating film material.. 2015-01-01.

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