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Effect of microstructure on mechanical and tribological properties of TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering
Wu, Z. L.; Li, Y. G.; Wu, B.; Lei, M. K.
刊名THIN SOLID FILMS
2015
卷号597页码:197-205
关键词Modulated pulsed power magnetron sputtering Titanium aluminum silicon nitride Nanocomposite Hardness Wear
ISSN号0040-6090
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4407954
专题大连理工大学
作者单位1.Dalian Univ Technol, Surface Engn Lab, Sch Mat Sci & Engn, Dalian 116024, Peoples R China.
2.Hunan Agr Univ, Southern Reg Collaborat Innovat Ctr Grain & Oil C, Coll Engn, Changsha 410128, Hunan, Peoples R China.
3.Dalian Univ Technol, Surface Engn Lab, Sch Mat Sci & Engn, Dalian 116024, Peoples R China.
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GB/T 7714
Wu, Z. L.,Li, Y. G.,Wu, B.,et al. Effect of microstructure on mechanical and tribological properties of TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering[J]. THIN SOLID FILMS,2015,597:197-205.
APA Wu, Z. L.,Li, Y. G.,Wu, B.,&Lei, M. K..(2015).Effect of microstructure on mechanical and tribological properties of TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering.THIN SOLID FILMS,597,197-205.
MLA Wu, Z. L.,et al."Effect of microstructure on mechanical and tribological properties of TiAlSiN nanocomposite coatings deposited by modulated pulsed power magnetron sputtering".THIN SOLID FILMS 597(2015):197-205.
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