CORC  > 大连理工大学
Nitrogen mass transfer models for plasma-based low-energy ion implantation
Zheng, Bocong; Wang, Kesheng; Zhang, Zhipeng; Che, Honglong; Lei, Mingkai
刊名JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
2015
卷号33页码:-
ISSN号0734-2101
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/4406103
专题大连理工大学
作者单位Dalian Univ Technol, Sch Mat Sci & Engn, Surface Engn Lab, Dalian 116024, Peoples R China.
推荐引用方式
GB/T 7714
Zheng, Bocong,Wang, Kesheng,Zhang, Zhipeng,et al. Nitrogen mass transfer models for plasma-based low-energy ion implantation[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,2015,33:-.
APA Zheng, Bocong,Wang, Kesheng,Zhang, Zhipeng,Che, Honglong,&Lei, Mingkai.(2015).Nitrogen mass transfer models for plasma-based low-energy ion implantation.JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A,33,-.
MLA Zheng, Bocong,et al."Nitrogen mass transfer models for plasma-based low-energy ion implantation".JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A 33(2015):-.
个性服务
查看访问统计
相关权益政策
暂无数据
收藏/分享
所有评论 (0)
暂无评论
 

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。


©版权所有 ©2017 CSpace - Powered by CSpace