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	Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel
	Zhang, Zhenyu; Guo, Liangchao; Cui, Junfeng; Wang, Bo; Kang, Renke; Guo, Dongming
刊名	SCIENTIFIC REPORTS
	2016
卷号	6页码:35269
ISSN号	2045-2322
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/4370377
专题	大连理工大学
作者单位	1.Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Peoples R China. 2.Dalian Univ Technol, Changzhou Inst, Changzhou 213164, Peoples R China. 3.Dalian Univ Technol, Minist Educ, Key Lab Precis & Nontradit Machining Technol, Dalian 116024, Peoples R China.
推荐引用方式 GB/T 7714	Zhang, Zhenyu,Guo, Liangchao,Cui, Junfeng,et al. Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel[J]. SCIENTIFIC REPORTS,2016,6:35269.
APA	Zhang, Zhenyu,Guo, Liangchao,Cui, Junfeng,Wang, Bo,Kang, Renke,&Guo, Dongming.(2016).Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel.SCIENTIFIC REPORTS,6,35269.
MLA	Zhang, Zhenyu,et al."Nanoscale solely amorphous layer in silicon wafers induced by a newly developed diamond wheel".SCIENTIFIC REPORTS 6(2016):35269.

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