An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions

	An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions
	Liu, YF ; Xie, J ; Zhang, ML ; Yang, JL ; Yang, FH
刊名	IEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
	2011
卷号	20 期号:2 Pages 页码:470-475
公开日期	2012-05-12
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/108765]
专题	上海微系统与信息技术研究所_传感技术联合国家重点实验室_期刊论文
推荐引用方式 GB/T 7714	Liu, YF,Xie, J,Zhang, ML,et al. An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions[J]. IEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2011,20(2 Pages):470-475.
APA	Liu, YF,Xie, J,Zhang, ML,Yang, JL,&Yang, FH.(2011).An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions.IEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,20(2 Pages),470-475.
MLA	Liu, YF,et al."An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions".IEEE JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 20.2 Pages(2011):470-475.