Novel silicon-on-insulator grating couplers based on CMOS polysilicon gate layer

	Novel silicon-on-insulator grating couplers based on CMOS polysilicon gate layer
	Qiu,C ; Sheng,Z ; Li,L ; Pang,A ; Wu,AM ; Du,JJ ; Chen,J ; Wang,X ; Gan,FW ; Zou,SC
刊名	OPTOELECTRONIC MATERIALS AND DEVICES VI
	2011
卷号	8308 期号:0 页码:83082G
关键词	SPIE-INT SOC OPTICAL ENGINEERING
ISSN号	0277-786X
公开日期	2012-04-10
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/106832]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Qiu,C,Sheng,Z,Li,L,et al. Novel silicon-on-insulator grating couplers based on CMOS polysilicon gate layer[J]. OPTOELECTRONIC MATERIALS AND DEVICES VI,2011,8308(0):83082G.
APA	Qiu,C.,Sheng,Z.,Li,L.,Pang,A.,Wu,AM.,...&Zou,SC.(2011).Novel silicon-on-insulator grating couplers based on CMOS polysilicon gate layer.OPTOELECTRONIC MATERIALS AND DEVICES VI,8308(0),83082G.
MLA	Qiu,C,et al."Novel silicon-on-insulator grating couplers based on CMOS polysilicon gate layer".OPTOELECTRONIC MATERIALS AND DEVICES VI 8308.0(2011):83082G.