Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate

	Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate
	Zhou, Y ; Wang, HL ; Ma, CH ; Gong, Q ; Feng, SL（封松林）
刊名	CHINESE PHYSICS LETTERS
	2011
卷号	28 期号:7 页码:78102
关键词	IOP PUBLISHING LTD
ISSN号	0256-307X
学科主题	Physics, Multidisciplinary
语种	英语
公开日期	2012-04-10
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/106752]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Zhou, Y,Wang, HL,Ma, CH,et al. Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate[J]. CHINESE PHYSICS LETTERS,2011,28(7):78102.
APA	Zhou, Y,Wang, HL,Ma, CH,Gong, Q,&Feng, SL.(2011).Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate.CHINESE PHYSICS LETTERS,28(7),78102.
MLA	Zhou, Y,et al."Fabrication of Hinged Mirrors Using a Strain-Driven Self-Assembly Method on a GaAs Substrate".CHINESE PHYSICS LETTERS 28.7(2011):78102.