Microstructure and optical effects of buried nano-cavities formed in silicon by hydrogen ion implantation

	Microstructure and optical effects of buried nano-cavities formed in silicon by hydrogen ion implantation
	Li, L ; Yu, YH ; Lin, ZX ; Wang, X ; Mandel, S ; Sundarvel, B ; Luo, EZ ; Wilson, IH
刊名	2000 INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY, PROCEEDINGS
	2000
页码	769-772
通讯作者	Li, L, Shanghai Inst Met, Shanghai, Peoples R China
学科主题	Computer Science, Hardware & Architecture; Engineering, Electrical & Electronic
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95837]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Li, L,Yu, YH,Lin, ZX,et al. Microstructure and optical effects of buried nano-cavities formed in silicon by hydrogen ion implantation[J]. 2000 INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY, PROCEEDINGS,2000:769-772.
APA	Li, L.,Yu, YH.,Lin, ZX.,Wang, X.,Mandel, S.,...&Wilson, IH.(2000).Microstructure and optical effects of buried nano-cavities formed in silicon by hydrogen ion implantation.2000 INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY, PROCEEDINGS,769-772.
MLA	Li, L,et al."Microstructure and optical effects of buried nano-cavities formed in silicon by hydrogen ion implantation".2000 INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY, PROCEEDINGS (2000):769-772.