Optical constants of tetrahedral amorphous carbon films in the infrared region and at a wavelength of 633 nm

	Optical constants of tetrahedral amorphous carbon films in the infrared region and at a wavelength of 633 nm
	Chen, ZY ; Zhao, JP
刊名	JOURNAL OF APPLIED PHYSICS
	2000
卷号	87 期号:9 页码:4268-4273
关键词	DIAMOND-LIKE-CARBON FILTERED CATHODIC ARC TA-C FILMS THIN-FILMS SUBPLANTATION MODEL COMPRESSIVE-STRESS THERMAL-STABILITY ATOMIC-STRUCTURE ION ENERGY DEPOSITION
ISSN号	0021-8979
通讯作者	Chen, ZY, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China
学科主题	Physics, Applied
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95786]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Chen, ZY,Zhao, JP. Optical constants of tetrahedral amorphous carbon films in the infrared region and at a wavelength of 633 nm[J]. JOURNAL OF APPLIED PHYSICS,2000,87(9):4268-4273.
APA	Chen, ZY,&Zhao, JP.(2000).Optical constants of tetrahedral amorphous carbon films in the infrared region and at a wavelength of 633 nm.JOURNAL OF APPLIED PHYSICS,87(9),4268-4273.
MLA	Chen, ZY,et al."Optical constants of tetrahedral amorphous carbon films in the infrared region and at a wavelength of 633 nm".JOURNAL OF APPLIED PHYSICS 87.9(2000):4268-4273.