Structural and optical properties of SiC films deposited on Si by DG magnetron sputtering

	Structural and optical properties of SiC films deposited on Si by DG magnetron sputtering
	Lei,YM ; Yu,YH ; Cheng,LL ; Lin,L ; Sundaraval,B ; Luo,EZ ; Lin,S ; Ren,CX ; Cheung,WY ; Wong,SP ; Xu,JB ; Zou,SC ; Wilson,IH
刊名	SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000
	2001
卷号	353-356 期号:0 页码:191-194
关键词	ALLOYS
ISSN号	0255-5476
通讯作者	Lei, YM, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, 865 Changning Rd, Shanghai 200050, Peoples R China
学科主题	Materials Science ; Multidisciplinary
收录类别	SCI
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95709]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Lei,YM,Yu,YH,Cheng,LL,et al. Structural and optical properties of SiC films deposited on Si by DG magnetron sputtering[J]. SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000,2001,353-356(0):191-194.
APA	Lei,YM.,Yu,YH.,Cheng,LL.,Lin,L.,Sundaraval,B.,...&Wilson,IH.(2001).Structural and optical properties of SiC films deposited on Si by DG magnetron sputtering.SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000,353-356(0),191-194.
MLA	Lei,YM,et al."Structural and optical properties of SiC films deposited on Si by DG magnetron sputtering".SILICON CARBIDE AND RELATED MATERIALS, ECSCRM2000 353-356.0(2001):191-194.