Dependence of structural, electrical, and optical properties of ZnO : Al films on substrate temperature

	Dependence of structural, electrical, and optical properties of ZnO : Al films on substrate temperature
	Chen, M ; Pei, ZL ; Wang, X ; Sun, C ; Wen, LS
刊名	JOURNAL OF MATERIALS RESEARCH
	2001
卷号	16 期号:7 页码:2118-2123
关键词	THIN-FILMS OXIDE-FILMS PARAMETERS RF
ISSN号	0884-2914
通讯作者	Chen, M, Chinese Acad Sci, Shanghai Inst Met, Ion Beam Lab, Shanghai 200050, Peoples R China
学科主题	Materials Science, Multidisciplinary
收录类别	SCI
语种	英语
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95681]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Chen, M,Pei, ZL,Wang, X,et al. Dependence of structural, electrical, and optical properties of ZnO : Al films on substrate temperature[J]. JOURNAL OF MATERIALS RESEARCH,2001,16(7):2118-2123.
APA	Chen, M,Pei, ZL,Wang, X,Sun, C,&Wen, LS.(2001).Dependence of structural, electrical, and optical properties of ZnO : Al films on substrate temperature.JOURNAL OF MATERIALS RESEARCH,16(7),2118-2123.
MLA	Chen, M,et al."Dependence of structural, electrical, and optical properties of ZnO : Al films on substrate temperature".JOURNAL OF MATERIALS RESEARCH 16.7(2001):2118-2123.