sp(3)/sp(2) ratio in amorphous-carbon thin film by spectroscopic ellipsometry

	sp(3)/sp(2) ratio in amorphous-carbon thin film by spectroscopic ellipsometry
	Li,WJ ; Song,ZR ; Yu,YH ; Wang,X ; Zou,SC ; Shen,DS
刊名	JOURNAL OF APPLIED PHYSICS
	2003
卷号	94 期号:1 页码:284-287
关键词	DIAMOND-LIKE CARBON COMPRESSIVE-STRESS
ISSN号	0021-8979
通讯作者	Li, WJ, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, Ion Beam Lab, Shanghai 200050, Peoples R China
学科主题	Physics ; Applied
收录类别	SCI
公开日期	2012-03-24
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/95486]
专题	上海微系统与信息技术研究所_功能材料与器件_期刊论文
推荐引用方式 GB/T 7714	Li,WJ,Song,ZR,Yu,YH,et al. sp(3)/sp(2) ratio in amorphous-carbon thin film by spectroscopic ellipsometry[J]. JOURNAL OF APPLIED PHYSICS,2003,94(1):284-287.
APA	Li,WJ,Song,ZR,Yu,YH,Wang,X,Zou,SC,&Shen,DS.(2003).sp(3)/sp(2) ratio in amorphous-carbon thin film by spectroscopic ellipsometry.JOURNAL OF APPLIED PHYSICS,94(1),284-287.
MLA	Li,WJ,et al."sp(3)/sp(2) ratio in amorphous-carbon thin film by spectroscopic ellipsometry".JOURNAL OF APPLIED PHYSICS 94.1(2003):284-287.